2D materials are promising candidates as nonlinear optical components for on-chip devices due to their ultrathin structure. In general, their nonlinear optical responses are inherently weak due to the short interaction thickness with light. Recently, there has been great interest in using quasi-bound states in the continuum (q-BICs) of dielectric metasurfaces, which are able to achieve remarkable optical near-field enhancement for elevating the second harmonic generation (SHG) emission from 2D materials. However, most studies focus on the design of combining bulk dielectric metasurfaces with unpatterned 2D materials, which suffer considerable radiation loss and limit near-field enhancement by high-quality q-BIC resonances. Here, we investigate the dielectric metasurface evolution from bulk silicon to monolayer molybdenum disulfide (MoS2), and discover the critical role of meta-atom thickness design on enhancing near-field effects of two q-BIC modes. We further introduce the strong-coupling of the two q-BIC modes by oblique incidence manipulation, and enhance the localized optical field on monolayer MoS2 dramatically. In the ultraviolet and visible regions, the MoS2 SHG enhancement factor of our design is 105 times higher than that of conventional bulk metasurfaces, leading to an extremely high nonlinear conversion efficiency of 5.8%. Our research will provide an important theoretical guide for the design of high-performance nonlinear devices based on 2D materials.

This publisher’s note corrects the funding order in Photon. Res.10, 2836 (2022)10.1364/PRJ.472114.

Terahertz (THz) molecular fingerprint sensing provides a powerful label-free tool for the detection of trace-amount samples. Due to the weak light–matter interaction, various metallic or dielectric metasurfaces have been adopted to enhance fingerprint absorbance signals. However, they suffer from strong background damping or complicated sample coating on patterned surfaces. Here, we propose an inverted dielectric metagrating and enhance the broadband THz fingerprint detection of trace analytes on a planar sensing surface. Enhancement of the broadband signal originates from the effects of evanescent waves at the planar interface, which are excited by multiplexed quasi-bound states in the continuum (quasi-BICs). One can evenly boost the near-field intensities within the analytes by tuning the asymmetry parameter of quasi-BIC modes. The multiplexing mechanism of broadband detection is demonstrated by manipulating the incident angle of excitation waves and thickness of the waveguide layer. Compared to the conventional approach, the THz fingerprint peak value is dramatically elevated, and the largest peak enhancement time is 330. Our work gives a promising way to facilitate the metasensing of the THz fingerprint on a planar surface and will inspire universal THz spectral analysis for trace analytes with different physical states or morphologies.